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Queen's Advanced MicroEngineering Centre
School of Electronics, Electrical Engineering and Computer Science
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Microelectromechanical Systems (MEMS) and Devices
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Silicon On Insulator (SOI)
Metallisation
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Staff
Research Activities
Microelectromechanical Systems (MEMS) and Devices
Integrated Circuits and Electronic Devices
Silicon On Insulator (SOI)
Metallisation
Post Graduate Activities
News & Events
Links and Contacts
Services
Foundry
Contact Us
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University Research Centres
Queen's Advanced MicroEngineering Centre
Research Activities
Metallisation
Metallisation
Chemical Vapour Deposition of Tungsten
Chemical Vapour Deposition of Tungsten Silicide
Formation of Silicides and Germanides
Research Activities
Research Activities
Microelectromechanical Systems (MEMS) and Devices
Microfluidic Devices and Systems
rf MEMS
MEMS Toolkit
Actuators
Integrated Circuits and Electronic Devices
Silicon On Insulator (SOI)
Ground Plane Silicon on Insulator (GPSOI)
Silicon on Silicide on Insulator (SSOI) Substrates
Germanium Bonding
Non-Standard Thermal Substrates
Metallisation
CVD Tungsten
CVD of Tungsten Silicide
Formation of Silicides and Germanides
Post Graduate Activities
