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Queen's Advanced MicroEngineering Centre
School of Electronics, Electrical Engineering and Computer Science
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Microelectromechanical Systems (MEMS) and Devices
Integrated Circuits and Electronic Devices
Silicon On Insulator (SOI)
Metallisation
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Home
Staff
Research Activities
Microelectromechanical Systems (MEMS) and Devices
Integrated Circuits and Electronic Devices
Silicon On Insulator (SOI)
Metallisation
Post Graduate Activities
News & Events
Links and Contacts
Services
Foundry
Contact Us
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Staff
Research
Our
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Our
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University Research Centres
Queen's Advanced MicroEngineering Centre
Services
Foundry
Chemical Mechanical Polishing
Chemical Mechanical Polishing
Chemical Mechanical Polishing
Logitec Orbis CMP system:
Silicon
Polysilicon
Germanium
200mm substrates
Lapmaster
Copper CMP planarisation
Foundry
Foundry
Dry Silicon Etching
Metallisation
Bonding
Photolithography
Chemical Vapour Deposition
Test
Chemical Mechanical Polishing
Dielectric Etching
Wet Processing
