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Queen's Advanced MicroEngineering Centre
School of Electronics, Electrical Engineering and Computer Science
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Microelectromechanical Systems (MEMS) and Devices
Integrated Circuits and Electronic Devices
Silicon On Insulator (SOI)
Metallisation
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Location
Home
Staff
Research Activities
Microelectromechanical Systems (MEMS) and Devices
Integrated Circuits and Electronic Devices
Silicon On Insulator (SOI)
Metallisation
Post Graduate Activities
News & Events
Links and Contacts
Services
Foundry
Contact Us
Location
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Staff
Research
Our
Our
Our
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University Research Centres
Queen's Advanced MicroEngineering Centre
Services
Foundry
Dielectric Etching
Dielectric Etching
Dielectric etching
Dry etch
JLS Table Top Etcher: RIE of Si
3
N
4
and SiO
2
. Using CF
4
chemistry
Wet etch
Buffered HF (oxide etch)
Hot orthophosphoric acid (Si
3
N
4
)
Foundry
Foundry
Dry Silicon Etching
Metallisation
Bonding
Photolithography
Chemical Vapour Deposition
Test
Chemical Mechanical Polishing
Dielectric Etching
Wet Processing
